Microfluidic and MEMS Technologies

The flexible fabrication of special MEMS structures and microfluidic systems is not only made possible through diverse application of various technologies, but also through the flexible setup of the facilities. Moreover we offer the range of different materials.

We Fabricate Your Chips Depending on the Requirements

  • Wafer diameter: 100, 150 or 200 mm
  • Wafer thickness: 0,145 to 2 mm
  • Types of glass: e.g. borosilicate, fused silica (synthetic quartz glass)  and other substrates
  • Types of silicon: e.g. SOI or DSOI

Micronit is your competent and experienced partner for glass as well as silicon chips. For both we offer the optimal application-specific degree of integration to you.

Through the combination of the single process steps and the experience in different branches, Micronit realizes the fabrication of microchips in variable quantities. For each problem set you get a solution. You can rely on the competence of an experienced partner.

If you have any questions or requests, please call +49 (0) 231 88 68 077